Depth profiling characterisation of the surface layer obtained by pulsed Nd :YAG laser irradiation of titanium in nitrogen
Depth profiling characterisation of the surface layer obtained by pulsed Nd :YAG laser irradiation of titanium in nitrogen
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DOI：
10.1016/s0257-8972(03)00520-6
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发表时间：
2003-08
影响因子：
5.4
通讯作者：
E. György;Á. D. Pino;P. Serra;J. Morenza
中科院分区：
文献类型：
--
作者：
E. György;Á. D. Pino;P. Serra;J. Morenza
研究了在高压氮气中用Nd：YAG脉冲激光（λ=1.064 μm，τ = 120 ns，ν=1 kHz）辐照Ti靶所获得的表面层的成分。通过扫描电子显微镜、X射线衍射仪、二次离子质谱仪、X射线光电子能谱仪（XPS）和俄歇电子能谱仪（Auger electron spectroscopy）对样品的表面形貌、结晶状态和元素的深度分布进行了分析。通过XPS谱的解卷积研究了化学结合态。渗层表面均匀，主要由四方相δ′-TiN x晶相组成。氮的浓度在深度上先增加，直到约0.15 μm，然后减少，直到最大测量深度2 μm。TiNx化学计量比从接近表面的x = 0.8变化到在大约0.2 μm深度处的x = 0.5，其保持在该值附近直到大约0.5 μm，并且对于更大的深度减小直到在1.6 μm处的0.1。此外，氧浓度迅速下降，并在约0.2 μm处达到体Ti的浓度。
We investigated the composition of the surface layer obtained by pulsed Nd:YAG laser (λ=1.064 μm, τ∼120 ns, ν=1 kHz) irradiation of Ti targets in high pressure nitrogen. The surface morphology, the crystalline state, and the depth distribution of the elements were analysed by scanning electron microscopy, X-ray diffractometry, secondary ion mass spectrometry, X-ray photoelectron spectroscopy (XPS), and Auger electron spectroscopy. The chemical binding states were studied by deconvolution of the XPS spectra. The layer has a uniform surface, and mainly consists of the tetragonal δ′-TiNxcrystalline phase. The nitrogen concentration increases firstly in the depth until approximately 0.15 μm, and then decreases until the greatest measured depth of 2 μm. The TiNxstoichiometry changes from x≈0.8 close to the surface to x≈0.5 at a depth of approximately 0.2 μm, it remains around this value until approximately 0.5 μm, and for greater depths decreases until 0.1 at 1.6 μm. Furthermore, the oxygen concentration decreases quickly and reaches the concentration of bulk Ti at approximately 0.2 μm.