Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects
Quantifying low fluence ion implants in diamond-like carbon film by secondary ion mass spectrometry by understanding matrix effects
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DOI：
10.1039/d0ja00375a
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发表时间：
2021-01-01
影响因子：
3.4
通讯作者：
Woolum, Dorothy S.
中科院分区：
文献类型：
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作者：
Jurewicz, Amy J. G.;Olinger, Chad T.;Woolum, Dorothy S.
类金刚石碳（DLC）中的微量元素和痕量元素难以使用西姆斯分析进行定量，因为即使在单个cm大小的样品中，微量元素和结构变化也会导致主要基质效应。虽然这种材料最常用于摩擦涂层，其中微量元素组成并不重要，但它越来越多地用于电子设备。然而，这是一个独特的应用，刺激了这项工作：无水，四面体配位的DLC（ta-C）被用作太阳风（SW）收集器材料在创世纪太阳风样品返回使命（美国宇航局发现5）。因此，在近15年的时间里，我们一直致力于使用西姆斯对Genesis DLC中的微量元素和痕量元素进行精确测量，以实现我们的使命目标。具体来说，我们已经学会了处理我们的样品中的相关基质效应，离子注入到ta-C中。我们未知的定量元素是SW Mg，一种低剂量的（1.67 x 10（12）cm（-2）;类似于6 μ g g（-1 24）Mg），低能量（类似于24 keV平均能量）注入;我们的标准是高剂量（类似于Mg-25，Mg-26）75 keV实验室植入物，已经测量了Mg-26/Mg-25的绝对比率，以解释可变的仪器质量分馏。使用具有低冲击能量和类似于2 × 10（14）离子/cm（2）的电流密度的O-2（+）初级离子进行分析。虽然我们的未知数是太阳风，但该方法适用于许多需要量化DLC中微量元素的情况。建议修改其他西姆斯条件下的数据减少技术。
Minor and trace elements in diamond-like carbon (DLC) are difficult to quantify using SIMS analysis because minor elemental and structural variations can result in major matrix effects even across individual, cm-sized samples. While this material is most commonly used for tribological coatings where minor element composition is not of critical importance, it is being increasingly used in electronic devices. However, it is a unique application that spurred this work: anhydrous, tetrahedrally-coordinated DLC (ta-C) was used as a solar wind (SW) collector material in the Genesis solar-wind sample return mission (NASA Discovery 5). So, for similar to 15 years, we have been working on attaining accurate and precise measurement of minor and trace elements in the Genesis DLC using SIMS to achieve our mission goals. Specifically, we have learned to deal with relevant matrix effects in our samples, ion implants into ta-C. Our unknown element for quantification is SW Mg, a low-dose (1.67 x 10(12) at cm(-2); similar to 6 mu g g(-1 24)Mg), low-energy (similar to 24 keV average energy) implant; our standard is a high-dose (similar to 1 x 10(14) at cm(-2) of both Mg-25, Mg-26) 75 keV laboratory implant for which the absolute Mg-26/Mg-25 ratio had been measured to account for variable instrumental mass fractionation. Analyses were performed using O-2(+) primary ions having both a low impact energy and a current density of similar to 2 x 10(14) ions per cm(2). Although our unknown was solar wind, the method is applicable to many situations where minor elements in DLC need to be quantified. Recommendations are presented for modifying this data-reduction technique for other SIMS conditions.