Four-point probe measurement of non-uniformities in semiconductor sheet resistivity☆
Four-point probe measurement of non-uniformities in semiconductor sheet resistivity☆
复制标题
四点探针测量半导体薄层电阻率不均匀性☆
DOI:
10.1016/0038-1101(64)90038-3
复制
发表时间:
1964
影响因子:
1.7
通讯作者:
L. Swartzendruber
中科院分区:
文献类型:
--
作者:
L. Swartzendruber