A method for precision patterning of silicone elastomer and its applications
A method for precision patterning of silicone elastomer and its applications
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DOI：
10.1109/jmems.2004.832188
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发表时间：
2004-08-01
影响因子：
2.7
通讯作者：
Liu, C
中科院分区：
文献类型：
--
作者：
Ryu, KS;Wang, XF;Liu, C
本文提出了一种通用的薄膜聚二甲基硅氧烷（PDMS）精密图形化的微细加工方法。该方法使得PDMS微结构能够在硅或玻璃基板上具有受控的横向尺寸和厚度。基于这种新方法的两个应用程序进行了讨论。首先，一个扫描探针显微镜（SPM）探针与PDMS针尖的开发和用于扫描探针接触印刷（SPCP）。其次，本文展示了表面微加工膜与集成硅胶垫圈。
This paper presents a general microfabrication method for precision patterning of thin-film poly(dimethylsiloxane) (PDMS). The method enables PDMS microstructures with controlled lateral dimensions and thickness on a silicon or glass substrate. Two applications based on this new method are discussed. First, a scanning probe microscopy (SPM) probe with PDMS tip is developed and used for scanning probe contact printing (SPCP). Second, this paper demonstrates surface micro-machined membranes with integrated silicone gaskets.