Mechanical properties of hard AlCrN-based coated substrates
Mechanical properties of hard AlCrN-based coated substrates
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DOI：
10.1016/j.surfcoat.2009.03.017
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发表时间：
2009-06
影响因子：
5.4
通讯作者：
E. Bourhis;P. Goudeau;M. Staia;E. Carrasquero;E. S. Puchi-Cabrera
中科院分区：
文献类型：
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作者：
E. Bourhis;P. Goudeau;M. Staia;E. Carrasquero;E. S. Puchi-Cabrera
本研究的目的是通过纳米和微米压痕研究三种市售的硬质 AlCrN 基涂层基材，旨在确定薄膜的固有硬度。随后讨论所获得的结果，同时考虑到由 X 射线衍射确定的残余应力和结构（晶粒尺寸和织构）以及文献中已发表的数据。该研究首先针对单片 CrN 和 AlCrN 涂层进行，并进一步扩展到多层 AlCrN/TiSiN 涂层的分析。对于 CrN、AlCrN 和 AlCrN/TiSiN 涂层，从低深度纳米压痕和微压痕数据建模中获得的硬度分别与在 22、30 和 31 GPa 下获得的值相匹配。残余应力从 CrN 涂层的轻微拉伸变化到 AlCrN 和 AlCrN/TiSiN 涂层的高度压缩，而忽略微应变的平均晶粒尺寸对于三种涂层 (10–15 nm) 是相似的。 AlCrN 和 AlCrN/TiSiN 响应的相似性是由于与多晶子层的纳米结构（纳米晶粒尺寸）相比，分层所产生的影响较小。
The present investigation has been conducted in order to study three commercially available hard AlCrN-based coated substrates by means of nano- and microindentation, aimed at determining the intrinsic hardness of the films. The results obtained are subsequently discussed taking into consideration the residual stresses and structure (grain size and texture) determined by X-ray diffraction and in the light of published data available in the literature. The study is first carried out with monolithic CrN and AlCrN coatings and it is further extended to the analysis of multilayer AlCrN/TiSiN coatings. Hardness obtained from nanoindentation at low depth and modelling the microindentation data match with values obtained at 22, 30 and 31 GPa for CrN, AlCrN and AlCrN/TiSiN coatings respectively. Residual stresses change from slightly tensile for CrN coating to highly compressive for AlCrN and AlCrN/TiSiN ones while the average grain sizes neglecting microstrains are similar for the three coatings (10–15 nm). AlCrN and AlCrN/TiSiN response similarities result from the low influence played by the stratification as compared to the nanostructure of the polycrystalline sublayers (nanometric grain size).