Highly absorbing nano-scale metal films for terahertz
Highly absorbing nano-scale metal films for terahertz
复制标题
DOI：
10.1117/12.894088
复制
发表时间：
2011-09
期刊：
影响因子：
--
通讯作者：
F. Alves;Apostolos Karamitros;D. Grbovic;B. Kearney;G. Karunasiri
中科院分区：
文献类型：
--
作者：
F. Alves;Apostolos Karamitros;D. Grbovic;B. Kearney;G. Karunasiri
我们的工作旨在确定纳米级的金属薄膜，增强吸收1至10 THz之间的热成像仪在这个光谱带中使用。不同厚度（8 - 30 nm）的铬和镍膜的吸收测量显示在3和9 THz之间的吸收高达40%（Cr）和27%（Ni）。进一步的分析表明，通过图案化金属膜以降低填充因子来控制金属膜的导电性，可以优化吸收。这种设计灵活性允许定制吸收层，以减少微测辐射热计和双材料热传感器中使用的膜的残余应力。
Our work aims to identify nano-scale metal films with enhanced absorption between 1 to 10 THz for use in thermal imagers operating in this spectral band. Absorption measurements of chromium and nickel films with different thicknesses (8 - 30 nm) revealed absorption as high as 40% (Cr) and 27% (Ni) between 3 and 9 THz. Further analysis showed that it is possible to optimize absorption by controlling conductivity of metal films by patterning them to reduce fill factor. This design flexibility allows tailoring of the absorbing layer to reduce residual stress of membranes used in microbolmeter and bi-material thermal sensors.