Electro-chemical micro drilling using ultra short pulses
Electro-chemical micro drilling using ultra short pulses
复制标题
DOI：
10.1016/j.precisioneng.2003.07.004
复制
发表时间：
2004-04-01
影响因子：
3.6
通讯作者：
Chu, CN
中科院分区：
文献类型：
--
作者：
Ahn, SH;Ryu, SH;Chu, CN
电化学加工（ECM）在微细加工中的应用很少，因为其电场不局域化。在这项工作中，具有数十纳秒持续时间的超短脉冲被用来定位溶解区域。研究了电压、脉冲宽度和脉冲频率对定位距离的影响。在20 μ m厚的304不锈钢箔上钻制出直径为8 μ m的高质量微孔。通过控制电压和脉冲宽度可以控制定位距离，并产生各种孔形状，包括阶梯孔和锥形自由孔。(C)2003年由Elsevier Inc.出版
Electro-chemical machining (ECM) has been rarely applied in micro machining because the electric field is not localized. In this work, ultra short pulses with tens of nanosecond duration are used to localize dissolution area. The effects of voltage, pulse duration, and pulse frequency on the localization distance were studied. High quality micro hole with 8 mum diameter was drilled on 304 stainless steel foil with 20 mum thickness. Localization distance can be manipulated by controlling the voltage and pulse duration, and various hole shapes were produced including stepped holes and taper free holes. (C) 2003 Published by Elsevier Inc.