Fluid-resistive bending sensor having perfect compatibility with flexible pneumatic balloon actuator

Fluid-resistive bending sensor having perfect compatibility with flexible pneumatic balloon actuator
复制标题

与柔性气动气球执行器完美兼容的液阻弯曲传感器

DOI:
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发表时间:
2006
期刊:
IEEE/LEOS International Conference on Optical MEMS
影响因子:
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通讯作者:
S. Konishi
S. Konishi
中科院分区:
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文献类型:
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作者:
S. Kusuda;S. Sawano;S. Konishi

文献摘要

被引文献

相似文献

提出了一种新型的柔性微结构弯曲传感器,特别是以聚二甲基硅氧烷(PDMS)为材料的气动气囊驱动器(PBA)。所提出的传感器根据流体结构的弯曲来检测流体阻力变化。在不增加传感器结构的情况下,将具有气动通道的PBA结构转移到流阻式弯曲传感器。因此,所提出的传感器与PBA具有完美的兼容性。结合PBA和所提出的弯曲传感器,还设计了刚度传感器。5 mm × 10 mm × 300 mum PDMS悬臂式刚度传感器集成PBA和弯曲传感器可以成功地执行。本文介绍了柔性PBA的流体电阻弯曲传感器及其在医疗应用中作为刚度传感器的应用。
This paper proposes a novel bending sensor for flexible micro structures, especially Pneumatic Balloon Actuator (PBA) made of PDMS (polydi- methylsiloxan). Proposed sensor detects fluid resistance change depending on bending of fluidic structure. Structure of PBA with pneumatic channel is diverted to the fluid-resistive bending sensor without adding extra structure for sensor. Consequently, the proposed sensor has a perfect compatibility with PBA. A stiffness sensor is also designed by combining PBA and proposed bending sensor. 5 mm times 10 mm times 300 mum PDMS cantilever type stiffness sensor integrated with PBA and bending sensor could perform successfully. This paper describes the fluid-resistive bending sensor for flexible PBA and its application for stiffness sensor toward medical application.