Influence of N2 partial pressure on structural and microhardness properties of TiN/ZrN multilayers deposited by Ar/N2 vacuum arc discharge

Influence of N2 partial pressure on structural and microhardness properties of TiN/ZrN multilayers deposited by Ar/N2 vacuum arc discharge
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DOI:
10.1016/j.nimb.2016.05.029
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发表时间:
2016-08
影响因子:
1.3
通讯作者:
M. Naddaf;B. Abdallah;M. Ahmad;M. A-Kharroub
M. Naddaf;B. Abdallah;M. Ahmad;M. A-Kharroub
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
M. Naddaf;B. Abdallah;M. Ahmad;M. A-Kharroub

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