Use of thermally induced higher order modes of a microcantilever for mercury vapor detection
Use of thermally induced higher order modes of a microcantilever for mercury vapor detection
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DOI：
10.1063/1.2194128
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发表时间：
2006-05
影响因子：
3.2
通讯作者：
A. Kadam;G. Nordin;M. George
中科院分区：
文献类型：
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作者：
A. Kadam;G. Nordin;M. George
我们证明了使用热致高阶模式的微悬臂梁作为一种替代检测技术，通过研究金汞相互作用。前四个热致弯曲模式（即，基模和前三个高阶模）已经被检验用于两个不同的Au涂层。在第一种情况下，沿着矩形Si微悬臂梁的整个长度沿着溅射沉积50 nm厚的Au。在第二种情况下，Au被限制在硅微悬臂梁的尖端处的30μm长度。在这两种情况下的微悬臂梁光谱响应和偏转已被研究作为汞浓度和总曝光时间的函数。对于低剂量的研究，高阶模式显示出不同的汞传感响应，而基本模式没有。对于第一种和第二种情况，在N2中暴露于约15ppb Hg的总时间为300 s时，四阶模式的频移分别为−320和− 70 Hz。
We demonstrate the use of thermally induced higher order modes of a microcantilever as an alternate detection technique by studying Au–Hg interactions. The first four thermally induced flexural modes (i.e., the fundamental and first three higher order modes) have been examined for two different Au coatings. In the first case, 50nm thick Au is sputter deposited along the entire length of a rectangular Si microcantilever. In the second case the Au is confined to a 30μm length at the tip of the Si microcantilever. In both cases the microcantilever spectral response and deflection has been studied as a function of Hg concentration and total exposure time. For the low doses studied, the higher order modes show a distinct Hg sensing response whereas the fundamental mode does not. The frequency shift for the fourth order mode for a total exposure of 300s to approximately 15ppb Hg in N2 is found to be −320 and −70Hz for the first and second cases, respectively.