Adaptive scanning optical microscope: large field of view and high-resolution imaging using a MEMS deformable mirror
Adaptive scanning optical microscope: large field of view and high-resolution imaging using a MEMS deformable mirror
复制标题
DOI：
10.1117/1.2909451
复制
发表时间：
2008-04
影响因子：
2
通讯作者：
B. Potsaid;J. Wen
中科院分区：
文献类型：
--
作者：
B. Potsaid;J. Wen
对于在生物、医学和制造业中的广泛应用，与高分辨率显微镜系统相关的小视场在实践中构成了巨大的挑战。本文介绍了一种光学显微镜的设计，称为自适应扫描光学显微镜(ASOM)，它使用MEMS可变形反射镜和专门设计的扫描透镜来实现极大的视场扩展。大多数自适应光学系统(例如望远镜和眼科仪器)被设计为在标称工作条件下实现接近理想的性能，并且主要使用自适应光学元件来补偿对光学系统外部的波前的时变干扰。与这种方法不同的是，ASOM中的可变形反射镜是光学系统的一个组成部分，静态(玻璃)光学元件经过专门设计，以匹配可变形反射镜的形状校正能力。使用与可变形镜驱动电压相协调的高速转向镜，ASOM通过扫描工作空间进行操作，并应在比传统显微镜设计大两个数量级的区域内实现衍射限制成像。凭借高速转向镜允许的快速扫描功能，以及在每次曝光时获取完整图像，Asom在动态可重新配置和适应性成像方面具有优势，而不会对工作空间造成干扰。在描述了ASOM的设计和工作原理之后，我们给出了一个低成本的ASOM原型的结果。
For a wide range of applications in biology, medicine, and manufacturing, the small field of view associated with high resolution microscope systems poses a significant challenge in practice. This paper describes an optical microscope design, called the Adaptive Scanning Optical Microscope (ASOM), which uses a MEMS deformable mirror working with a specially designed scanning lens to achieve a greatly expanded field of view. Most adaptive optics systems (e.g. telescopes and ophthalmology instruments) are designed to achieve near ideal performance under nominal operating conditions and primarily use the adaptive optics element to compensate for a time varying disturbance to the wavefront that is external to the optical system. In contrast to this approach, the deformable mirror in the ASOM is an integral component of the optical system and the static (glass) optical elements have been specifically designed to match the shape correcting capabilities of the deformable mirror. Using a high speed steering mirror coordinated with the deformable mirror actuation voltages, the ASOM operates by scanning over the workspace and should achieve diffraction limited imaging over a region approximately two orders of magnitude larger in area than a traditional microscope design. With the rapid scanning capabilities allowed by the high speed steering mirror and by acquiring a complete image during each exposure, the ASOM offers advantages in dynamically reconfigurable and adaptable imaging with no agitation to the workspace. After describing the design and operating principle of the ASOM, we present results from a low cost ASOM prototype.