Simulation of single-point diamond turning fabrication process errors

Simulation of single-point diamond turning fabrication process errors
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DOI:
10.1117/12.511341
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发表时间:
2003-11
期刊:
CIRP Annals
影响因子:
--
通讯作者:
Richard C. Juergens;R. Shepard;J. Schaefer
Richard C. Juergens;R. Shepard;J. Schaefer
中科院分区:
其他
文献类型:
--
作者:
Richard C. Juergens;R. Shepard;J. Schaefer

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光学表面的单点金刚石车削正变得越来越普遍,特别是在红外系统中。然而,该过程引入了其自身特有的图形误差形式,这可能会影响性能。这些误差包括工具未对准误差、热效应、低频表面涟漪和安装效应。已经开发了使用常规光学设计代码在蒙特卡罗模拟中对这些效应进行建模的技术,以预测光学性能的变化。
Single point diamond turning of optical surfaces is becoming more commonly used, especially in infrared systems. However, the process introduces its own peculiar forms of figure error that can compromise performance. These errors include tool misalignment error, thermal effects, low frequency surface ripple, and mounting effects. Techniques have been developed to model these effects in Monte Carlo simulations using conventional optical design codes to predict the changes in optical performance.