Influence of Substrate Materials upon Fabrication of Aluminum Nitride Coatings by Reactive RF Plasma Spraying
Influence of Substrate Materials upon Fabrication of Aluminum Nitride Coatings by Reactive RF Plasma Spraying
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DOI：
10.2320/matertrans.47.1671
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发表时间：
2006-07
影响因子：
1.2
通讯作者：
M. Yamada;Hajime Nakamura;T. Yasui;M. Fukumoto;T. Koyata
中科院分区：
文献类型：
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作者：
M. Yamada;Hajime Nakamura;T. Yasui;M. Fukumoto;T. Koyata
根据喷涂到不同基材上的情况，研究了基材材料对反应性射频等离子喷涂氮化铝（AlN）涂层制备的影响。将铝颗粒注入 Ar/N2 等离子体中，并沉积在碳钢 (S45C)、铝合金 (A6063) 和石英基板上。在使用碳钢基材的情况下，可以制备厚而致密的铝基Al/AlN复合涂层。然而，由于AlN和碳钢之间的热膨胀系数差异，涂层中较高浓度的AlN相在喷涂后冷却过程中从涂层上剥落。因此，尝试在AlN层和碳钢基体之间形成Al中间层以降低热应力。结果，通过控制喷涂过程中等离子气体中的N2流量，在碳钢基材上制备了包含Al/AlN复合涂层的Al夹层。虽然可以在 Al 中间层上制造 AlN 层，但人们担心在涂层和基材之间的界面处形成 Fe-Al 金属间化合物会形成缺陷。然后不再使用Al中间层而是使用铝合金作为基材。然而，即使通过水冷基材支架冷却基材，铝合金基材也会在喷涂过程中熔化。因此，要求基材的熔点远高于铝。另一方面，几乎完全使用石英基底制备AlN涂层，其具有较低的热膨胀系数和较高的熔点。因此，反应性射频等离子喷涂制备AlN或AlN基Al/AlN复合涂层时，要求基体材料具有低热膨胀系数和高熔点的特性。特别地，石英可用作基板材料。 [doi:10.2320/matertrans.47.1671]
Influence of the substrate materials upon fabrication of aluminum nitride (AlN) coatings by reactive RF plasma spraying was investigated according to spraying onto various substrate materials. Aluminum particles were injected into Ar/N2 plasma and were deposited onto carbon steel (S45C), aluminum alloy (A6063) and quartz substrates. In the case of using carbon steel substrate, fabrication of thick and dense Al based Al/AlN composite coatings was possible. However, higher concentration of AlN phase in the coatings peeled off the coatings during cool down after spraying due to the difference in thermal expansion coefficient between AlN and carbon steel. Therefore, formation of Al interlayer was attempted between AlN layer and carbon steel substrate in order to decrease the thermal stress. As the result, Al interlayer included Al/AlN composite coating was fabricated onto a carbon steel substrate with control the N2 flow rate in plasma gas during spraying. While fabrication of AlN layer onto Al interlayer was possible, it was concerned that formation of Fe-Al intermetallic compound at the interface between the coating and the substrate formed defects. Then not the Al interlayer but aluminum alloy was used as the substrate. However, the aluminum alloy substrate melted during spraying even the substrate was cooled by water-cooled substrate holder. Therefore, it is demanded to the substrate materials have a melting point that is much higher than aluminum. On the other hand, almost completely AlN coatings were fabricated using quartz substrate, which involves lower thermal expansion coefficient and higher melting point. Therefore, the characteristics of low thermal expansion coefficient and high melting point were required for substrate materials in order to fabricate AlN or AlN based Al/AlN composite coatings by reactive RF plasma spraying. Especially, quartz was useful for the substrate material. [doi:10.2320/matertrans.47.1671]