SMART - a program to measure SEM resolution and imaging performance
SMART - a program to measure SEM resolution and imaging performance
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DOI：
10.1046/j.1365-2818.2002.01062.x
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发表时间：
2002-10-01
影响因子：
2
通讯作者：
Joy, DC
中科院分区：
文献类型：
--
作者：
Joy, DC
重要的是能够测量参数，如空间分辨率，像散，信噪比，漂移和不稳定性，表征扫描电子显微镜的性能。这些数量可以通过对仪器在感兴趣的条件下记录的数字显微照片进行傅里叶分析来最可靠地确定。一个旨在以自动化方式实现所有必要步骤的程序已被开发为流行的“宏”，并且免费提供，NIH图像和SCION图像程序。
It is important to be able to measure the parameters, such as spatial resolution, astigmastism, signal-to-noise ratio, and drift and instability, that characterize the performance of a scanning electron microscope. These quantities can be determined most reliably by a Fourier analysis of digital micrographs from the instrument, recorded under conditions of interest. A program designed to implement all of the necessary steps in an automated manner has been developed as a 'macro' for the popular, and freely available, NIH Image and SCION Image programs.