Linear ion source with closed drift and extended acceleration region.
Linear ion source with closed drift and extended acceleration region.
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DOI：
10.1063/1.2821507
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发表时间：
2008-02
期刊：
影响因子：
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通讯作者：
D. Park;Ji-Hwan Kim;Y. Ermakov;Won‐Kook Choi
中科院分区：
文献类型：
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作者：
D. Park;Ji-Hwan Kim;Y. Ermakov;Won‐Kook Choi
讨论了由E x B场引起的闭合漂移和扩展加速区的离子源。传统的圆形封闭式漂移离子源虽然具有气体电离效率高、束流能量低等优点，但在扩大束流尺寸方面存在局限性。设计并测试了一种具有270 mm陶瓷沟道宽度的马蹄形直线离子源。排出惰性气体（Ar）和反应气体（O（2））。放电电流与放电电压成比例，并在320 V的放电电压下增加到氩气中的16.3 A和氧气中的15.6 A。提取的离子束电流也与放电电压成比例，并在280 V后饱和。在距离子源100 mm处，氩束和氧束中的测量值分别为0.78 mA/cm（2）和0.73 mA/cm（2）。氩离子束在整个束提取区域上显示出比氧更好的空间均匀性。
Ion source with closed drift, which is caused by E x B field, and extended acceleration region is discussed. Though conventional circular-type closed drift ion source has advantages of high efficiency of gas ionization and low ion beam energy, there is a limitation in enlarging the beam size. Linear ion source with horse-track shape with 270 mm ceramic channel width is newly designed and tested. Inert gas (Ar) and reactive gas (O(2)) are discharged. Discharge is ignited with voltage of 90 V. Discharge current is proportional to discharge voltage and increases up to 16.3 A in argon and 15.6 A in oxygen at discharge voltage of 320 V. Extracted ion beam current is also proportional to discharge voltage and is saturated after 280 V for both gases. It is measured up to 0.78 mA/cm(2) in argon beam and 0.73 mA/cm(2) in oxygen beam at a distance of 100 mm from the ion source. Argon ion beam shows better space uniformity than oxygen across the beam extraction region.