XPS Applications in Thin Films Research
XPS Applications in Thin Films Research
复制标题
XPS 在薄膜研究中的应用
DOI：
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发表时间：
2002
期刊：
影响因子：
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通讯作者：
H. Onishi
中科院分区：
文献类型：
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作者：
S. Geng;Sam Zhang;H. Onishi
XPS（X射线光电子能谱）或ESCA（用于化学分析的电子能谱）作为表面分析技术已经发展了多年，并且已经成功地用于表征各种薄膜。薄膜的成分、化学状态、深度分布、成像和厚度等信息在薄膜研究中特别有用。本文旨在综述XPS在薄膜领域的应用。
XPS (X-ray Photoelectron Spectroscopy) or ESCA (Electron Spectroscopy for Chemical Analysis) as a surface analytical technique has been developed over years and has been used successfully in characterization of a variety of thin films. Information such as composition, chemical states, depth profile, imaging and thickness of thin films is especially useful in thin film research. This paper aims at reviewing these applications of XPS in thin film area.