Optical Constants of 6H?SiC Single Crystals
Optical Constants of 6H?SiC Single Crystals
复制标题
DOI：
10.1143/jjap.33.2479
复制
发表时间：
1994-05
影响因子：
1.5
通讯作者：
S. Ninomiya;S. Adachi
中科院分区：
文献类型：
--
作者：
S. Ninomiya;S. Adachi
利用椭圆偏振光谱法测量了垂直于和平行于光轴c偏振的6H-SiC复合介电函数。在1.2 ~ 5.4 eV的光子能量范围内，对6H-SiC的（0001）和（010）表面进行了测量。测量的介电函数谱用经典的洛伦兹振子模型拟合。利用一阶Sellmeier方程分析了透明区（E < 4.5 eV）的折射率。从这个分析中，我们得到了6H-SiC的高频介电常数e∞，对于e⊥c为6.59，对于e //c为6.67。利用Lyddane-Sachs-Teller关系，我们还得到了e⊥c的静态介电常数为9.76，e //c的静态介电常数为9.98。
The complex dielectric functions of 6H–SiC for light polarized perpendicular and parallel to the optic axis c were measured using spectroscopic ellipsometry. The measurements were made on the (0001) and (010) surfaces of 6H–SiC in the photon energy range between 1.2 and 5.4 eV at room temperature. The measured dielectric-function spectra were fitted with a classical Lorentz-type oscillator model. The indices of refraction in the transparent region (E < 4.5 eV) were also analyzed using the first-order Sellmeier equation. From this analysis, we obtained the high-frequency dielectric constants e∞ of 6H–SiC as 6.59 for E ⊥c and 6.67 for E //c. Using the Lyddane-Sachs-Teller relation, we also obtained the static dielectric constants e s as 9.76 for E ⊥c and 9.98 for E //c.