Fully Inkjet Printed RF Inductors and Capacitors Using Polymer Dielectric and Silver Conductive Ink With Through Vias
Fully Inkjet Printed RF Inductors and Capacitors Using Polymer Dielectric and Silver Conductive Ink With Through Vias
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DOI：
10.1109/ted.2015.2396004
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发表时间：
2015-03-01
影响因子：
3.1
通讯作者：
Shamim, Atif
中科院分区：
文献类型：
--
作者：
McKerricher, Garret;Perez, Jose Gonzalez;Shamim, Atif
在本文中，使用聚 4-乙烯基苯酚（PVP）墨水作为介电层和银纳米粒子墨水作为导体来制造和表征全喷墨印刷多层电容器和电感器。采用新型溶解方法创建的喷墨印刷通孔可用于在多层喷墨印刷工艺中制作射频结构。这些通孔是在 350 nm PVP 薄膜中实现的，电阻优于 0.1 Ω。 10 至 75 nH 的螺旋电感器已实现，最大品质因数约为 5。 10nH 电感器的自谐振频率略低于 1GHz。金属-绝缘体-金属电容器的密度为 50 pF/mm(2)。这些电容器的值范围为 16 至 50 pF。 16 pF 电容器显示出超过 1.5 GHz 的自谐振频率。在带通孔的全喷墨印刷多层工艺中成功实现电感器和电容器是迈向全喷墨印刷大面积柔性射频系统的重要一步。
In this paper, fully inkjet printed multilayer capacitors and inductors are fabricated and characterized using poly 4-vinylphenol (PVP) ink as the dielectric layer and silver nanoparticle ink as the conductor. Inkjet printed through vias, created with a novel dissolving method are used to make RF structures in a multilayer inkjet printing process. The vias have been realized in a 350-nm PVP film and exhibit resistance better than 0.1 Omega. Spiral inductors from 10 to 75 nH have been realized with maximum quality factors around five. The 10-nH inductor exhibits a self-resonant frequency slightly below 1 GHz. Metal-insulator-metal capacitors are realized with densities of 50 pF/mm(2). These capacitors demonstrate values ranging from 16 to 50 pF. The 16-pF capacitor shows a self-resonant frequency over 1.5 GHz. The successful implementation of inductors and capacitors in an all inkjet printed multilayer process with vias is an important step toward fully inkjet-printed large area and flexible RF systems.