Improved analysis of microbeams under mechanical and electrostatic loads
Improved analysis of microbeams under mechanical and electrostatic loads
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DOI：
10.1088/0960-1317/7/1/005
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发表时间：
1997-03
影响因子：
2.3
通讯作者：
Bumkyoo Choi;E. Lovell
中科院分区：
文献类型：
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作者：
Bumkyoo Choi;E. Lovell
对机械和静电载荷的轴向约束双夹紧微梁的拉伸效应进行了分析。基于射击方法（数值积分程序）的计算机代码已开发用于计算引起的张力、挠度和应力。通过数值模拟推导并验证了集中力、分布压力和静电载荷的解析解。所考虑的微梁的典型尺寸为 。已经评估了有或没有诱导张力和/或残余应变的各种情况。当包括诱导张力时，位移和应力会减小，并且当包括固有张力时，位移和应力要小得多。
Stretching effects in axially constrained doubly clamped microbeams have been analysed for mechanical and electrostatic loads. A computer code based on the shooting method, a numerical integration procedure, has been developed for calculating the induced tension, deflections and stresses. Analytic solutions for concentrated force, distributed pressure and electrostatic loading were derived and verified by numerical simulation. Typical dimensions for microbeams considered are . Various cases have been evaluated, with and without induced tension and/or residual strain. Displacements and stresses are reduced when induced tension is included and are considerably smaller with intrinsic tension.