Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation
Design of the optical sensor head for the evaluation of pitch deviation of a diffraction grating based on the laser autocollimation
复制标题
基于激光自准直的衍射光栅节距偏差评估光学传感器头的设计
DOI：
10.1016/j.measen.2021.100135
复制
发表时间：
2021
期刊：
影响因子：
--
通讯作者：
Gao Wei
中科院分区：
文献类型：
--
作者：
Shimizu Yuki;Quan Lue;Shin Dong Wook;Matsukuma Hiraku;Gao Wei
设计并研制了一种用于测量衍射光栅节距偏差的光学装置。该装置采用多个自准直单元，可同时检测衍射光的衍射角。这使得光学传感器头能够评估标尺节距偏差，同时将标尺局部斜率和标尺角度误差运动的贡献与传统激光衍射法无法实现的贡献分开。本文首先对角度传感器所需的分辨率进行了理论分析。在此基础上进行了角度传感器光学头的设计。利用所建立的光头样机进行了可行性试验，并对一种商用光学直线编码器的刻度栅距偏差进行了测量。
An optical setup for measurement of the pitch deviation of a diffraction grating has been designed and developed. Multiple autocollimation units are employed in the setup so that the angles of diffraction of diffracted beams can be detected simultaneously. This enables the optical sensor head to evaluate the scale pitch deviation while separating the contributions from the scale local slope and the scale angular error motion that cannot be achieved by the conventional laser diffraction methods. In this paper, firstly, the resolution needed for the angle sensor is estimated using a theoretical analysis. After that, the design of an optical head for the angle sensor is carried out. A built prototype optical head is also used to conduct some feasibility tests, and the measurement of the pitch deviation of a scale grating brought from a commercial optical linear encoder is demonstrated.
用于可追踪光栅间距校准的成像激光衍射仪
影响因子：
2.4
作者：
J. Pekelsky;B. Eves;P. R. Nistico;J. Decker
通讯作者：
J. Decker
影响因子：
2.4
作者：
Koening, Rainer;Weichert, Christoph;Bosse, Harald
通讯作者：
Bosse, Harald
DOI：
10.1016/j.precisioneng.2020.09.008
发表时间：
2021-01-01
影响因子：
3.6
作者：
Quan, Lue;Shimizu, Yuki;Gao, Wei
通讯作者：
Gao, Wei