EDXTOOLS — Computer Programmes for the Determination of Critical EDX Spectrometer Parameters
EDXTOOLS — Computer Programmes for the Determination of Critical EDX Spectrometer Parameters
复制标题
EDXTOOLS — 用于确定关键 EDX 光谱仪参数的计算机程序
作者：
M. Procop
摘要。根据ISO或EN规范的质量保证需要定期检查关键仪器参数。并非所有随仪器购买的商业软件都支持相关测量及其快速评估。EDXTOOLS包括一个程序库，它在这方面补充了现有的电子激发能量色散x射线光谱（EDS）软件。EDXTOOLS可以通过评估铜或镍光谱中的L/K强度比或通过计算实验中吸收探测器层的厚度来检查检测效率，这可以在任何扫描电子显微镜上进行。此外，测量光谱可以通过吸收介质的透射曲线进行修正，以估计其对定量分析结果的影响。EDXTOOLS允许从Fe-55光谱中确定信号与背景比，并拟合k线的测量FWHM以找到分辨率曲线。通过计算轻元素k线的EDX光谱，并比较不同公式、物理数据表和选择用于计算的探测器参数的结果光谱，可以完成这些工作。EDXTOOLS是用MATLAB®编写的，这是一种广泛使用的解释器语言。这样做的好处是程序是可读的文本文件。用户可以检查每个计算步骤并修改它。安装MATLAB®及其优化工具箱是使用EDXTOOLS的必要条件。
Abstract. Quality assurance according to ISO or EN norms entails a periodical check of critical instrumental parameters. Not yet all commercial software purchased with instruments supports the related measurements and their fast evaluation. EDXTOOLS consist of a programme library which complements the existing software for electron excited energy dispersive X-ray spectrometry (EDS) in this respect. EDXTOOLS can be used to check the detection efficiency by the evaluation of the L/K intensity ratio in a copper or nickel spectrum or by the calculation of the thickness of absorbing detector layers from experiments, which can be performed on any scanning electron microscope. Moreover, measured spectra can be modified by the transmission curve of absorbing media to estimate their influence on the result of quantitative analysis. EDXTOOLS allow the determination of the signal to background ratio from an Fe-55 spectrum and the fitting of measured FWHM’s of K-lines to find the resolution curve . They are completed by the possibility of calculating EDX spectra for the K-lines of light elements and to compare the resulting spectra for different formulae, physical data tables, and detector parameters chosen for the calculation. EDXTOOLS are written in MATLAB®, a wide spread interpreter language. This has the advantage that the programmes are readable text files. A user can check each computational step and modify it. The installation of MATLAB® and its optimization toolbox is necessary to work with EDXTOOLS.