Subsurface damage in scratch testing of silicon nitride
Subsurface damage in scratch testing of silicon nitride
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DOI:
10.1016/s0043-1648(03)00395-8
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发表时间:
2004
期刊:
影响因子:
5
通讯作者:
W. Kanematsu
中科院分区:
文献类型:
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作者:
W. Kanematsu