Copper (II) oxide thin film for methanol and ethanol sensing

Copper (II) oxide thin film for methanol and ethanol sensing
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DOI:
10.21307/ijssis-2017-465
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发表时间:
2011-12-01
影响因子:
1.2
通讯作者:
Rajanna, K.
Rajanna, K.
中科院分区:
其他
文献类型:
--
作者:
Parmar, Mitesh;Rajanna, K.

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一个纳米结构的铜(II)氧化物薄膜沉积的反应直流磁控溅射技术,已被研究的静态传感器响应对甲醇和乙醇的工作温度和分析物浓度调制。甲醇和乙醇传感的最佳工作温度(T-opt)分别为350 ℃和400 ℃。2500 ppm甲醇和乙醇的最大灵敏度分别为29%和15.4%。另一个重要的观察结果是,灵敏度时间随着分析物浓度的增加而减少,而恢复时间则增加。2500 ppm甲醇和乙醇的响应时间分别为235 s和247 s。
A nanostructured copper (II) oxide film deposited by reactive DC-magnetron sputtering technique, has been studied for static sensor response towards methanol and ethanol by operating temperature and analyte concentration modulations. The optimum operating temperature (T-opt) for the sensing of methanol and ethanol is observed to be 350 degrees C and 400 degrees C, respectively. The maximum sensitivity observed for 2500 ppm methanol and ethanol is 29% and 15.4% respectively. Another important observation is that the sensitivity time reduces with analyte concentrations, where as recovery time increases. The response time of 2500 ppm methanol and ethanol is 235 s and 247 s correspondingly.