An integrated array of multiple thin-film metal oxide sensors for quantification of individual components in organic vapor mixtures
An integrated array of multiple thin-film metal oxide sensors for quantification of individual components in organic vapor mixtures
复制标题
多个薄膜金属氧化物传感器的集成阵列，用于定量有机蒸气混合物中的各个成分
DOI：
10.1016/0925-4005(93)85426-b
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发表时间：
1993
影响因子：
8.4
通讯作者：
P. Carey
中科院分区：
文献类型：
--
作者：
Xaodong Wang;S. Yee;P. Carey
本文提出了一种集成阵列由八个薄膜金属氧化物传感器，并证明其功能性能分析甲醇和丙酮的混合物。该传感器采用11道掩模工艺制作成3.1mm × 2.9mm的硅片。传感元件是由SnO2、ZnO、TiO2和WO3的反应溅射薄膜的单层和双层构成的，有和没有Pd催化剂。通过片上硼扩散加热元件实现传感器温度升高。传感器响应由人工神经网络处理，用于校准传感器阵列和预测未知的蒸汽浓度。结果表明，该方法能够以较低的精度对传感器响应对应的丙酮和甲醇浓度进行定量判别。
This paper presents an integrated array consisting of eight thin-film metal oxide sensors and demonstrates its functional performance in analyzing mixtures of methanol and acetone. The sensors are fabricated into a 3.1 mm × 2.9 mm silicon chip in an eleven-mask process sequence. The sensing elements are constituted using single layers and bilayers of reactively sputtered thin films of SnO2, ZnO, TiO2, and WO3with and without Pd catalyst. Elevated sensor temperature is achieved through on-chip boron-diffused heating elements. The sensor responses are processed by an artificial neutral network for calibrating the sensor array and predicting the unknown vapor concentrations. The results show that the concentrations of acetone and methanol corresponding to the sensor responses can be quantitatively discriminated at a low cost of precision.