Surface-Micromachined Optical Interferometry System Utilizing Three-Dimensional Micromirrors and Microgratings
Surface-Micromachined Optical Interferometry System Utilizing Three-Dimensional Micromirrors and Microgratings
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DOI：
10.1143/jjap.44.l668
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发表时间：
2005-05
影响因子：
1.5
通讯作者：
Ju-Nan Kuo;Gwo-Bin Lee;W. Pan
中科院分区：
文献类型：
--
作者：
Ju-Nan Kuo;Gwo-Bin Lee;W. Pan
提出了一种新型的三维微镜和微光栅相结合的微光学干涉仪。干涉测量系统包括一个固定光栅反射镜、两个可旋转反射镜和一个由静电驱动振荡结构驱动的可移动光栅反射镜。弯曲多晶硅结构的使用大大降低了振荡结构的静电工作电压（4 V），并允许光栅的高速运动（2 kHz）。本研究提出的新系统提供了更宽的调制频率，因此具有更宽的频率响应。此外，所提出的微光干涉仪可以应用于微光实验台上，以方便信号调制和精密测量应用。
This paper presents a novel micro-optical interferometer incorporating three-dimensional micromirrors and microgratings. The interferometry system comprises a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated oscillating structure. The use of a curved polysilicon structure lowers the electrostatic operating voltage (4 V) of the oscillating structure substantially and permits high-speed movement (2 kHz) of the grating. The novel system presented in this study provides a wider modulation frequency, and hence a wider frequency response. Furthermore, the proposed micro-optical interferometer can be applied to a micro-optical bench to facilitate signal modulation and precision measurement applications.