Development of miniaturized electron probe X-ray microanalyzer.
Development of miniaturized electron probe X-ray microanalyzer.
复制标题
小型化电子探针X射线显微分析仪的开发。
DOI：
10.1021/ac201958d
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发表时间：
2011
影响因子：
7.4
通讯作者：
J. Kawai
中科院分区：
文献类型：
--
作者：
S. Imashuku;Akira Imanishi;J. Kawai
采用热释电晶体作为电子源，实现了一种小型化的电子探针X射线微分析仪（EPMA）。我们提出的EPMA是迄今为止报道的最小的。通过研究获得的连续X射线的能量和过渡金属（钛、铁和镍）的较低检测限来评价EPMA的性能。获得了45 keV的连续X射线的终点能量（Duane-Hunt极限）。然而，预计EPMA可以分析能量小于20 keV的特征X射线。EPMA能够测量投影面积大于0.03 mm（2）的钛、铁和镍丝。
A miniaturized electron probe X-ray microanalyzer (EPMA) with a small chamber including the electron source and the sample stage was realized using a pyroelectric crystal as an electron source. The EPMA we propose is the smallest reported so far. Performance of the EPMA was evaluated by investigating energy of obtained continuous X-rays and lower detection limits of transition metals (titanium, iron, and nickel). End point energy (Duane-Hunt limit) of continuous X-rays of 45 keV was obtained. However, it is expected that the EPMA can analyze characteristic X-rays with energy less than 20 keV. The EPMA was able to measure titanium, iron, and nickel wires whose projected areas were more than 0.03 mm(2).