Ultra-precision micro structuring by means of mechanical machining

Ultra-precision micro structuring by means of mechanical machining
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DOI：
10.1109/memsys.2001.906469
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发表时间：
2001-01
期刊：
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
影响因子：
--
通讯作者：
T. Kawai;K. Sawada;Y. Takeuchi
T. Kawai;K. Sawada;Y. Takeuchi
中科院分区：
其他
文献类型：
--
作者：
T. Kawai;K. Sawada;Y. Takeuchi

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利用自行研制的超纳米无摩擦加工机，采用机械加工技术，加工出多种高精度的微结构。
A variety of microstructures with high accuracy were introduced by means of mechanical machining technology, using the authors' super-nano friction free machine.