Surface stress effects on the resonance properties of cantilever sensors
Surface stress effects on the resonance properties of cantilever sensors
复制标题
DOI：
10.1103/physrevb.72.085405
复制
发表时间：
2005-08
影响因子：
3.7
通讯作者：
P. Lu;H. Lee;Chun Lu;S. O’Shea
中科院分区：
文献类型：
--
作者：
P. Lu;H. Lee;Chun Lu;S. O’Shea
表面应力对悬臂梁传感器的谐振频率的影响进行了分析建模，将应变依赖的表面应力项的运动方程。这种机械方法可以等同于相应的热力学描述，允许导出将分析与实验确定的参数联系起来的基本方程。的例子示出的情况下的纯表面应力和吸附引起的表面应力，并表明，频率测量可能是有用的表面和吸附引起的应力对金属，半导体和纳米结构的基本理解。应用于生物分子吸附传感器似乎不太可能。
The effect of surface stress on the resonance frequency of a cantilever sensor is modeled analytically by incorporating strain-dependent surface stress terms into the equations of motion. This mechanistic approach can be equated with a corresponding thermodynamic description, allowing basic equations to be derived that link the analysis to experimentally determined parameters. Examples are shown for the cases of a pure surface stress and an adsorption-induced surface stress, and indicate that frequency measurements may be useful for fundamental understanding of surface and adsorption-induced stresses on metals, semiconductors, and nanoscale structures. Application to biomolecular adsorption sensors appears unlikely.