Improved quality factor spiral inductors on GaAs substrates
Improved quality factor spiral inductors on GaAs substrates
复制标题
GaAs 基板上改进的品质因数螺旋电感器
DOI：
10.1109/75.798028
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发表时间：
1999
期刊：
影响因子：
--
通讯作者：
I. Bahl
中科院分区：
文献类型：
--
作者：
I. Bahl
我们提供了几个在GaAs衬底上制造的具有改进质量因子的螺旋电感的测试数据。实验表明，螺旋电感的质量因子可以通过减小磁感应电流和缩小内匝线宽来提高，类似于硅微机械电感的报道。使用这种技术，我们观察到螺旋电感的质量系数比具有恒定线宽的标准螺旋电感提高了22%。
We present test data for several spiral inductors with improved quality factors fabricated on GaAs substrates. It has been shown experimentally that the quality factor of spiral inductors can be increased by reducing magnetically induced currents and by narrowing the line width of the inner turns similar to the one reported for silicon micromachined inductor. Using this technique, we observed about 22% improvement in the quality factor of spiral inductors as compared to standard spiral inductors having constant line width.