Corrosion protection of ultra-thin ta-C films for recording slider applications at varied substrate bias
Corrosion protection of ultra-thin ta-C films for recording slider applications at varied substrate bias
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DOI：
10.1016/j.surfcoat.2008.08.077
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发表时间：
2009-01
影响因子：
5.4
通讯作者：
M. Tan;Yiwu Yan;Hua‐Yu Zhang;Xiao Han;Jiaqi Zhu;Jiecai Han;Hongtao Ma
中科院分区：
文献类型：
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作者：
M. Tan;Yiwu Yan;Hua‐Yu Zhang;Xiao Han;Jiaqi Zhu;Jiecai Han;Hongtao Ma
采用过滤式阴极真空电弧系统制备了超薄四面体非晶碳（ta-C）薄膜，用于记录磁头。为了研究不同衬底偏压下沉积的ta-C膜的腐蚀行为，采用拉曼光谱、原子力显微镜、水接触角和腐蚀测量等方法对ta-C膜的微观结构和表面性质进行了研究。结果表明，在中等偏压（100 V）下制备的ta-C薄膜表面平整，表面能最低，sp3键含量最高。然而，对于防腐蚀的保护，发现最佳偏压大于给出最大类金刚石性质的偏压。
Ultra-thin tetrahedral amorphous carbon (ta-C) films have been prepared by filtered catholic vacuum arc system for recording slider applications. In order to study the corrosion behavior of the slider coatings deposited at different substrate bias, the micro-structure and surface properties of the ta-C films were respectively investigated in terms of Raman spectroscopy, atomic force microscopy, water contact angle and corrosion measurements. Results showed that a very smooth ta-C film with lowest surface energy and highest sp3bonding content was obtained at the medium bias voltage of 100 V. However, as to the protection against corrosion, the optimum bias was found to be greater than that giving the maximum diamond-like properties.