Absolute Value Measurements of Thin Film Permeability
Absolute Value Measurements of Thin Film Permeability
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薄膜磁导率的绝对值测量
DOI：
10.1109/tjmj.1991.4565292
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发表时间：
1991
期刊：
影响因子：
--
通讯作者：
A. Hosono
中科院分区：
文献类型：
--
作者：
Y. Shimada;J. Numazawa;Y. Yoneda;A. Hosono
已经开发出一种在 VHF 频率范围内高精度测量薄膜磁导率的方法。可以非常高精度地预测强磁场中薄膜样品的磁导率；然后将该渗透率用作测量系统的标准。测量了具有不同间隔物厚度的多层膜和FeZrN微晶膜。结果表明，即使使用厚度为2000埃的绝缘间隔物，也无法抑制多层膜中的涡流损耗，并且微晶膜在高频范围内表现出相对较高的损耗。
A method for highly precise measurement of the permeability of thin films in the VHF frequency range has been developed. The permeability of a film sample in a strong magnetic field can be predicted with very high accuracy; this permeability is then used as the standard of a measurement system. Multilayer films with various spacer thicknesses and a FeZrN micro-crystalline film were measured. Results showed that eddy current losses in the multilayer films cannot be suppressed even with insulating spacers as thick as 2000Å, and that the micro-crystalline film exhibits relatively high losses in the high-frequency range.