A Control Method of Ultrasonic Actuator-Driven Precision Stages Based on Stick-Slip Compensation and Continuous-Path Tracking
A Control Method of Ultrasonic Actuator-Driven Precision Stages Based on Stick-Slip Compensation and Continuous-Path Tracking
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基于粘滑补偿和连续路径跟踪的超声波执行器驱动精密平台控制方法
DOI：
10.1541/ieejias.125.582
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发表时间：
2005
影响因子：
--
通讯作者：
T. Ohmi
中科院分区：
文献类型：
--
作者：
S. Hashimoto;K. Ohishi;K. Kosaka;T. Ishikawa;H. Kubota;T. Ohmi
本文提出了一种基于摩擦模型的超精密平台控制，该平台配备了非谐振超声波执行器（SPIDER）。 SPIDER有望成为适用于以电子束为下一代光源的半导体制造阶段的致动器。首先，通过实验确定作为平台位置函数的摩擦特性。其次，通过测量静摩擦特性随时间的变化，提出了控制系统的在线辨识方法。然后，讨论了基于摩擦模型的PI控制系统补偿。除PI控制系统外，还设计了带补偿的连续路径跟踪控制系统。最后通过定位实验对基于模型的控制方法进行了验证。
This paper presents a friction model-based control of an ultra-precision stage that is equipped with the non-resonant ultrasonic actuator (SPIDER). The SPIDER is expected as an actuator suitable for stages for semiconductor manufacturing with the electron beam which is light source in next generation. At first, the friction characteristics as a function of stage position are experimentally identified. Next, measuring the time variation of the static friction characteristics, the on-line identification method for the control system is proposed. And then, a friction model-based compensation for the PI control system is discussed. In addition to the PI control system, the continuous-path tracking control system with the compensation is designed. Finally, the model-based control method is verified through the positioning experiments.