Photoconductive characteristics of hydro-oxygenated amorphous titanium oxide films prepared by remote plasma enhanced CVD

Photoconductive characteristics of hydro-oxygenated amorphous titanium oxide films prepared by remote plasma enhanced CVD
复制标题

远程等离子体增强CVD制备氢化非晶氧化钛薄膜的光电导特性

DOI:
--
复制
发表时间:
2006
期刊:
Japan Journal Applied Physics 45(In print)
影响因子:
--
通讯作者:
Y.Hatanaka
Y.Hatanaka
中科院分区:
--
文献类型:
--
作者:
K.Sakaguchi;K.Shimakawa;Y.Hatanaka

文献摘要

相似文献