Removal of SU-8 photoresist using buckling-driven delamination assisted with a carbon dioxide snow jet for microfluidics fabrication
Removal of SU-8 photoresist using buckling-driven delamination assisted with a carbon dioxide snow jet for microfluidics fabrication
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DOI：
10.1088/0960-1317/17/12/009
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发表时间：
2007-12
影响因子：
2.3
通讯作者：
Sheng-Chung Yang;Yu-Cheng Lin
中科院分区：
文献类型：
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作者：
Sheng-Chung Yang;Yu-Cheng Lin
本文介绍了一种新型的、环保、廉价、无损的去除微流控制造中电镀模具后的SU-8的方法。提出了一种可控的热脱层方法，该方法由高效高速气溶胶射流辅助，由两个主要步骤组成，即脱层，然后通过提升去除。在340°C的升温ΔT下进行了30 min的热过程实验。结果表明，试件发生了4次脱层，临界屈曲应力分别为38.98、35.24、42.04和41.26 MPa。结果表明，这些分层分别发生在升温ΔT 290、260.5、314.7和308.5℃时。热屈曲驱动的分层形貌为边缘初始化和直边化。在距离喷嘴出口10 mm处，CO2雪射流的升力Fdp、阻力Fd和冲击力Fi分别为79 × 10−3 N、0.625 × 10−3 N和（1.65 ~ 4.95）× 10−3 N。通过对升力、阻力和冲击力的分析，发现升力在CO2喷雪的作用中占主导地位，且升力比其他作用力大几十倍。实验和分析表明，CO2雪射流与喷嘴出口的最佳距离为6 ~ 10 mm。
A new, environmentally friendly, inexpensive and non-destructive method for removing SU-8 after being an electroplating mold in microfluidic fabrication is demonstrated in this paper. A controllable thermal delaminating method assisted by an efficient high-speed aerosol jet consisting of two major steps, delamination followed by removal by lifting, is presented. Experiments with the thermal process, operated at a rising temperature ΔT of 340 °C for 30 min, were carried out. Four delaminations were observed and the critical buckling stresses were calculated to be 38.98, 35.24, 42.04 and 41.26 MPa, respectively. The results show that these delaminations occurred at a rising temperature ΔT of 290, 260.5, 314.7 and 308.5 °C, respectively. The morphology of the thermal buckling-driven delamination was edge initiated and straight sided. The effects of the carbon dioxide (CO2) snow jet at a distance of 10 mm from the nozzle exit as well as the lift force Fdp, drag force Fd and impact force Fi were determined to be 79 × 10−3 N, 0.625 × 10−3 N and (1.65–4.95) × 10−3 N, respectively. Based on the analysis of the lift, drag and impact forces, the lifting force dominates the effects of the CO2 snow jet and is tens of times larger than the others. The experiments and analyses showed that the best distance for the CO2 snow jet to the nozzle exit was 6–10 mm.