A Practical Guide to Optical Metrology for Thin Films
A Practical Guide to Optical Metrology for Thin Films
复制标题
薄膜光学计量实用指南
DOI：
10.1002/9783527664344
复制
发表时间：
2012
影响因子：
2.4
通讯作者：
M. Quinten
中科院分区：
文献类型：
--
作者：
M. Quinten
www.wiley-vch.de这本书提出了一个全面的概述光学计量薄膜厚度测定的光学手段，从电动力学基础，和硬件组件，测量和评估的方法。作者是该领域的专家，具有学术和工业经验，专注于使用小型光谱仪进行光谱反射率测量，这是在线和离线厚度测定的最灵活的技术之一。
www.wiley-vch.de This book presents a comprehensive overview of optical metrology for thin film thickness determination by optical means, from electrodynamic basics, and hardware components, to methods of measurement and evaluation. The author, an expert in the field with both academic and industrial experience, concentrates on the spectral reflectance measurement with miniaturized spectrometers, one of the most flexible techniques for inline and offline thickness determination.