Design and Performance of a TES X-ray Microcalorimeter Array for Energy Dispersive Spectroscopy on Scanning Transmission Electron Microscope
Design and Performance of a TES X-ray Microcalorimeter Array for Energy Dispersive Spectroscopy on Scanning Transmission Electron Microscope
复制标题
用于扫描透射电子显微镜能量色散光谱的 TES X 射线微量热仪阵列的设计和性能
DOI：
10.1007/s10909-016-1547-3
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发表时间：
2016
影响因子：
2
通讯作者：
T. Hara
中科院分区：
文献类型：
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作者：
H. Muramatsu;K. Nagayoshi;T. Hayashi;K. Sakai;R. Yamamoto;K. Mitsuda;N. Yamasaki;K. Maehata;T. Hara
我们讨论了用于扫描透射电子显微镜 (STEM) 能量色散 X 射线光谱 (EDS) 的过渡边缘传感器 (TES) X 射线微量热仪阵列的设计和性能。与传统的硅漂移探测器相比，TES X 射线微量热仪具有更好的能量分辨率，并且利用 TES 探测器的 STEM-EDS 除了分析成分之外，还可以绘制样品上元素的分布图。 TES 探测器的要求是高计数率 (20 kcps)、宽能带 (0.5–15 keV) 和良好的能量分辨率 (10 eV) 半峰全宽。这一发展的主要改进是提高了最大计数率。为了适应高计数率，我们在读出方法中采用了无格式、64像素阵列和公共偏置方案。我们在内部完成了该设备的所有设计和制造。使用我们最近制造的器件，脉冲衰减时间为 40 秒，预计可达到 50 kcps。对于单个像素，测量的能量分辨率为 5.9 keV 时的 7.8 eV。该设备满足计数率和能量分辨率的要求，但仍存在一些必须确认性能的问题。
We discuss the design and performance of a transition edge sensor (TES) X-ray microcalorimeter array for scanning transmission electron microscope (STEM)–energy dispersive X-ray spectroscopy (EDS). The TES X-ray microcalorimeter has better energy resolution compared to conventional silicon drift detector and STEM–EDS utilizing a TES detector makes it possible to map the distribution of elements on a specimen in addition to analyze the composition. The requirement for a TES detector is a high counting rate (20 kcps), wide energy band (0.5–15 keV) and good energy resolution (10 eV) full width at half maximum. The major improvement of this development is to increase the maximum counting rate. In order to accommodate the high counting rate, we adopted anformat, 64-pixel array and common biasing scheme for the readout method. We did all design and fabrication of the device in house. With the device we have fabricated most recently, the pulse decay time is 40s which is expected to achieve 50 kcps. For a single pixel, the measured energy resolution was 7.8 eV at 5.9 keV. This device satisfies the requirements of counting rate and energy resolution, although several issues remain where the performance must be confirmed.