Mass detection sensitivity of piezoelectric cantilevers with a nonpiezoelectric extension
Mass detection sensitivity of piezoelectric cantilevers with a nonpiezoelectric extension
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DOI：
10.1063/1.2202913
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发表时间：
2006-06-01
影响因子：
1.6
通讯作者：
Shih, Wei-Heng
中科院分区：
文献类型：
--
作者：
Shen, Zuyan;Shih, Wan Y.;Shih, Wei-Heng
压电悬臂梁（PEC）是由压电层组成的横向换能器，例如，锆钛酸铅（PZT），结合到非压电层，例如，不锈钢，其在整个长度上具有均匀的横截面。另一方面，具有薄的非压电延伸的PEC具有两个不同的部分，每个部分具有自己的厚度和横向质量密度和弹性模量分布。具有非压电延伸部的压电悬臂梁已经越来越多地用作原位生物传感器，其具有仅将非压电延伸部浸入水溶液中而不使压电部分电绝缘的优点。在这项研究中，我们研究了实验和理论上的薄非压电延伸的效果，特别是，其长度比的压电部分上的振动波形和质量检测灵敏度的PEC。我们表明，非压电延伸造成的振动波形的实质性失真。由于波形失真，具有非压电延伸部的PEC的质量检测灵敏度可以高于相同长度的没有非压电延伸部的PEC的质量检测灵敏度。使用由0.25 mm厚的PZT层和0.07 mm厚的各种长度的不锈钢l（1）以及0.07 mm厚的各种长度的非压电不锈钢延伸部l（2）组成的PEC，我们表明对于任何l（1），第一、第二和第三模式的最大质量检测灵敏度发生在l（2）/l（1）= 0.6，0.28，和0.16，最大值分别是没有非压电延伸的相同l（1）的PEC的质量检测灵敏度的1.42、3.9和6.7倍。(c)2006年，美国物理学会。
A piezoelectric cantilever (PEC) is a transverse transducer consisting of a piezoelectric layer, e.g., lead zirconate titanate (PZT), bonded to a nonpiezoelectric layer, e.g., stainless steel, which has a uniform cross section throughout the length. A PEC with a thin nonpiezoelectric extension, on the other hand, has two distinctive sections each with its own thickness and transverse mass-density and elastic-modulus profiles. A piezoelectric cantilever with a nonpiezoelectric extension has been increasingly used as an in situ biosensor that has the advantage of dipping only the nonpiezoelectric extension part in an aqueous solution without electrically insulating the piezoelectric section. In this study, we examined both experimentally and theoretically the effect of the thin nonpiezoelectric extension, in particular, its length ratio to the piezoelectric part on the vibration wave form and mass detection sensitivity of a PEC. We showed that the nonpiezoelectric extension caused substantial distortion to the vibration wave form. Due to the wave form distortion, the mass detection sensitivity of a PEC with a nonpiezoelectric extension can be higher than that of a PEC of the same length without a nonpiezoelectric extension. Using PECs consisting of a 0.25 mm thick PZT layer and a 0.07 mm thick stainless steel of various lengths, l(1), and a 0.07 mm thick nonpiezoelectric stainless steel extension of various lengths, l(2), we showed that for any l(1), the maximum mass detection sensitivities of first, second, and third modes occurred at l(2)/l(1)=0.6, 0.28, and 0.16 and the maximum values were, respectively, 1.42, 3.9, and 6.7 times the mass detection sensitivity of a PEC of the same l(1) without a nonpiezoelectric extension. (c) 2006 American Institute of Physics.