Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator

Low loss singlemode optical waveguides with large cross-section in silicon-on-insulator
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绝缘体上硅中具有大横截面的低损耗单模光波导

DOI：
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发表时间：
1991
期刊：
影响因子：
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通讯作者：
G. Burbach
G. Burbach
中科院分区：
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文献类型：
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作者：
J. Schmidtchen;A. Splett;B. Schuppert;K. Petermann;G. Burbach

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报道了在绝缘体上硅（SOI）中实现宽度和高度均为几微米的单模脊形波导。在1.3和1.55 μm波长下的测量结果表明，波导损耗低于0.5dB/cm，近场强度分布与BPM模拟结果吻合得很好。
The realisation of singlemode rib waveguides in silicon-on-insulator (SOI) having a width and height of several micro-metres is reported. Measurements at a wavelength of 1.3 and 1.55 μm yield waveguide losses below 0.5 dB/cm and an excellent agreement of the near field intensity distribution with the one predicted by a BPM simulation.