Study on dip error compensation model of laser displacement sensor and its application in measurement of spiral curved surface profile
Study on dip error compensation model of laser displacement sensor and its application in measurement of spiral curved surface profile
复制标题
DOI：
10.1117/1.oe.61.5.054105
复制
发表时间：
2022-05
影响因子：
1.3
通讯作者：
Zhixu Dong;Renjie Guo;Mengnan Sun;Wei Xu
中科院分区：
文献类型：
--
作者：
Zhixu Dong;Renjie Guo;Mengnan Sun;Wei Xu
摘要。激光位移传感器具有分辨率高、稳定性好、速度快、体积小等特点，已广泛应用于多个领域。然而，其精度受到数据采集误差的严重制约。为了解决这一问题，我们重点研究了DAQ误差严重影响LDS测量精度的问题。基于激光三角测量，分析了光束和会聚光斑质心对系统测量精度的影响，建立了定量计算LDS测量表面倾角误差和电荷耦合器件（CCD）倾角误差的数学模型。此外，这些模型可用于补偿LDS实时收集的数据。最后，实验结果表明，采用这两种补偿模型对测量结果进行校正后，LDS测量精度大大提高，测量误差控制在0.008 mm以内，有效提高了螺旋曲面LDS测量精度。
Abstract. Featuring high resolution, excellent stability, great rapidity, and small size, the laser displacement sensor (LDS) has been extensively utilized in multiple domains. However, its accuracy is severely constrained by data acquisition (DAQ) errors. To solve this problem, we concentrate on the problem that DAQ errors seriously deteriorate the LDS measuring accuracy. Based on laser triangulation, we analyze the impact of laser beams and convergent spot centroid on the system measuring accuracy and establish mathematical models for quantitatively calculating LDS measured surface dip errors and charge-coupled device (CCD) dip errors. Further, these models can be used to compensate for the data collected by the LDS in real-time. Finally, experimental results show that after these two compensation models are used to correct measuring results, the accuracy of LDS-based DAQ is greatly improved, the measurement error is well controlled within 0.008 mm, and the LDS measuring accuracy on spiral curved surfaces is effectively boosted.