Undoped and 0.1 wt.% Ca-doped Pt-catalyzed SnO2 sensors for CH4 detection
Undoped and 0.1 wt.% Ca-doped Pt-catalyzed SnO2 sensors for CH4 detection
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DOI：
10.1016/j.snb.2004.12.112
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发表时间：
2005-07-22
影响因子：
8.4
通讯作者：
Choi, SD
中科院分区：
文献类型：
--
作者：
Min, BK;Choi, SD
未掺杂和0.1重量%的薄膜用离子束溅射法在Si衬底上沉积了30-60埃Pt层的Ca掺杂SnO_2薄膜。甲烷的灵敏度为那些Pt覆盖的未掺杂和Ca掺杂的SnO 2传感器进行了比较，在均方根表面粗糙度的扫描探针显微镜在AFM模式下测量。对于最大的CH 4灵敏度，存在45埃的最佳Pt厚度。Pt催化剂导致未掺杂传感器的甲烷灵敏度增加。然而，在Ca掺杂的SnO 2上涂覆Pt催化剂层导致对CH 4灵敏度的相反效果。所有制造的传感器表现出相对较小的湿度依赖性和良好的长期稳定性为90天。(c)2005 Elsevier B. V.保留所有权利。
Thin films of undoped and 0.1 wt.% Ca-doped SnO2 With 30-60 angstrom Pt layers deposited by ion beam sputtering have been structured on Si substrates. CH4 sensitivities for those Pt-covered undoped and Ca-doped SnO2 sensors are compared in terms of root-mean-square surface roughnesses measured by the scanning probe microscopy in the AFM mode. There is an optimal Pt thickness of 45 angstrom for maximum CH4 sensitivity. Pt catalysts lead to increase in methane sensitivity for the undoped sensor. However, coating of a Pt catalyst layer on the Ca-doped SnO2 results in an inverse effect on CH4 sensitivity. All the fabricated sensors exhibited relatively small humidity dependencies and excellent long-term stabilities for 90 days. (c) 2005 Elsevier B.V. All rights reserved.