An instrumentation grade wall shear stress sensing system
An instrumentation grade wall shear stress sensing system
复制标题
仪器级壁剪应力传感系统
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
M. Sheplak
中科院分区：
文献类型：
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作者：
C. Barnard;J. Meloy;M. Sheplak
本文介绍了一种用于风洞应用的MEMS壁面剪应力传感器系统的研制。模拟同步调制和解调接口电路允许交流和直流测量可变电容，以低噪声底数产生实时动态和平均流量信息。在整个系统中以最小的相位延迟保留了输入流的方向信息。在1.128 kHz下的灵敏度为3.45 mV/pa，直流稳定性为0.2 mV，平均剪切值的最小分辨率为58 mPa.实验还观察到3.5 kHz的物理共振和72dB的压阻比。
This paper describes development of a MEMS wall shear stress sensor system to be used in wind tunnel applications. An analog synchronous modulation and demodulation interface circuit allows for both ac and dc measurement of varying capacitance, yielding real-time dynamic and mean flow information with a low noise floor. Directional information of the input flow is retained throughout the system with minimal phase delay. A sensitivity of 3.45mV/Pa at 1.128kHz and a DC stability of 0.2mV indicate minimum resolution of mean shear values of 58mPa. Physical resonance of 3.5kHz and a pressure rejection ratio of 72dB are also observed.