Making aspherical mirrors by thin-film deposition.
Making aspherical mirrors by thin-film deposition.
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通过薄膜沉积制造非球面镜。
DOI：
10.1364/ao.32.005535
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发表时间：
1993
期刊：
影响因子：
1.9
通讯作者：
C. Chu
中科院分区：
文献类型：
--
作者：
C. C. Lee;D. Wan;C. Jaing;C. Chu
非球面镜是通过薄膜镀膜技术制成的。在蒸发源和要镀膜为非球面的基板之间放置一个特殊的掩模。充分描述了掩模的设计原理。离子辅助沉积技术用于减轻铝膜应力并增加表面反射率。最终波前通过非球面的传统干涉测量方法进行测试。无需太多的试验和错误即可实现小于五分之一波（632.8 nm）的球差。
An aspherical mirror is made by a thin-film coating technique. A special mask is placed between the evaporation source and the substrate that is to be coated as an aspheric. The design principle of the mask is fully described. An ion-assisted deposition technique is used to relieve aluminum film stress and to increase surface reflectance. The final wave front is tested by conventional interferometric methods for aspherics. Less than one-fifth of a wave (632.8 nm) of spherical aberration is achieved without much trial and error.