Effects of birefringence on Fizeau interferometry that uses a polarization phase-shifting technique.
Effects of birefringence on Fizeau interferometry that uses a polarization phase-shifting technique.
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DOI：
10.1364/ao.44.007548
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发表时间：
2005-12
期刊：
影响因子：
1.9
通讯作者：
Chunyu Zhao;Dongyel Kang;J. Burge
中科院分区：
文献类型：
--
作者：
Chunyu Zhao;Dongyel Kang;J. Burge
使用不同偏振状态作为参考光束和测试光束的干涉仪可以通过在成像系统中使用偏振光学器件来调制相对相移。因此，干涉仪可以同时捕获具有固定相移的图像，可用于相移干涉测量。由于所有测量都是同时进行的，因此干涉仪对振动不敏感。与 Twyman-Green 型系统相比，这种类型的斐索干涉仪具有优势，因为它们是共光路干涉仪。然而，当两个波前都由遭受双折射的光学器件传输时，偏振斐索干涉仪并不是严格意义上的公共路径。由于双折射，两束偏振光束看到不同的相位；结果，可能会在测量中引入误差。我们研究了斐索干涉仪中使用不同偏振技术时双折射对测量精度的影响。我们证明，如果参考光束和测试光束是圆偏振而不是线偏振，则测量误差会显着降低，并且可以消除。
Interferometers that use different states of polarization for the reference and the test beams can modulate the relative phase shift by using polarization optics in the imaging system. Thus the interferometer can capture simultaneous images that have a fixed phase shift, which can be used for phase-shifting interferometry. As all measurements are made simultaneously, the interferometer is not sensitive to vibration. Fizeau interferometers of this type have an advantage compared with Twyman-Green-type systems because they are common-path interferometers. However, a polarization Fizeau interferometer is not strictly common path when both wavefronts are transmitted by an optic that suffers from birefringence. The two polarized beams see different phases owing to birefringence; as a result, an error can be introduced in the measurement. We study the effect of birefringence on measurement accuracy when different polarization techniques are used in Fizeau interferometers. We demonstrate that measurement error is reduced dramatically and can be eliminated if the reference and test beams are circularly polarized rather than linearly polarized.