Energetic condensation: Processes, properties, and products
Energetic condensation: Processes, properties, and products
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DOI：
10.1116/1.579746
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发表时间：
1995-05
期刊：
影响因子：
--
通讯作者：
J. Colligon
中科院分区：
文献类型：
--
作者：
J. Colligon
当膜沉积伴随着低能量（小于几个100 eV）粒子的轰击时，所得的膜成核、生长、应力含量、粘附力、密度、组成、形态和晶体结构可能会显著改变。描述了用于为膜生长提供能量辅助条件的当前方法。给出了最近选定的结果，证明了所有上述特征，并讨论了改善薄膜质量的根本原因。选择应用的新材料，现在可以创建在各种基板上，以改善摩擦，磨损，耐腐蚀性和光学质量。审查最后概述了未来的趋势。
When film deposition is accompanied by bombardment by low energy (less than a few 100 eV) particles, the resulting film nucleation, growth, stress content, adhesion, density, composition, morphology, and crystal structure may be significantly altered. Current methods for providing the energy‐assisted conditions for film growth are described. Recent selected results are given demonstrating all the above features together with a discussion of the fundamental reasons for the improved film quality. Selected applications of the novel materials that can now be created on various substrates to improve friction, wear, corrosion resistance, and optical qualities are presented. The review concludes with an outline of future trends.