Influence of bias voltage on microstructure and properties of Al-containing diamond-like carbon films deposited by a hybrid ion beam system
Influence of bias voltage on microstructure and properties of Al-containing diamond-like carbon films deposited by a hybrid ion beam system
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偏压对混合离子束系统沉积含铝类金刚石碳薄膜微观结构和性能的影响
DOI：
10.1016/j.surfcoat.2012.03.076
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发表时间：
2013-08-25
影响因子：
5.4
通讯作者：
Wang, Aiying
中科院分区：
文献类型：
--
作者：
Dai, Wei;Ke, Peiling;Wang, Aiying
采用由阳极层离子源和磁控溅射组成的混合离子束系统在不同的偏置电压下沉积了含al类金刚石碳薄膜。利用XPS、TEM和拉曼光谱对膜的组成、微观结构和碳原子键进行了表征。采用纳米压痕和球盘摩擦试验机分别对其力学性能和摩擦学行为进行了研究。结果表明，偏置电压对薄膜的微观结构有显著影响，DLC薄膜中存在纳米条纹结构，这使得薄膜具有较高的硬度。摩擦试验表明，薄膜具有良好的摩擦性能，摩擦系数约为0.02。特别地，纳米条纹团簇的膜表现出良好的耐磨性，尽管纳米团簇似乎增加了摩擦系数。(C) 2012 Elsevier B.V.版权所有
Al-containing diamond-like carbon films were deposited using a hybrid ion beam system composed of an anode-layer ion source and a magnetron sputtering with various bias voltages. XPS, TEM and Raman spectroscopy were applied to characterize the film composition, microstructure, and carbon atom bond. Nano-indentation and ball-on-disk tribo-tester were also used to study the mechanical properties and tribological behavior, respectively. The results showed that the bias voltage played a significant role on the microstructure of the films, and nano-stripe structures were observed in the DLC films, which resulted in the relatively high hardness of the films. The friction tests revealed that the films possessed a superior friction performance with a friction coefficient of about 0.02. Specially, the film with the nano-stripe clusters exhibited a good wear resistance, though those nano-clusters seemed to increase the friction coefficient. (C) 2012 Elsevier B.V. All rights reserved.