Observation of ferri-nonmagnetic boundary in CrPt3 line-and-space patterned media using a dark-field transmission electron microscope

Observation of ferri-nonmagnetic boundary in CrPt3 line-and-space patterned media using a dark-field transmission electron microscope
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使用暗场透射电子显微镜观察 CrPt3 线和空间图案介质中的亚铁非磁性边界

DOI:
10.1016/j.jmmm.2011.12.019
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发表时间:
2012
影响因子:
2.7
通讯作者:
S. Iwata
S. Iwata
中科院分区:
材料科学3区
文献类型:
--
作者:
D. Oshima;E. Suharyadi;T. Kato;S. Iwata

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采用Kr+离子束辐照L12有序CrPt 3薄膜,在电子束光刻胶掩模下,以2× 1014 ions/cm 2的剂量辐照L12有序CrPt 3薄膜,制备了离子束光刻CrPt 3薄膜。利用透射电子显微镜对CrPt 3薄膜的截面进行了观察,研究了CrPt 3薄膜的图形化边界。暗场成像显示未照射(L12相)和照射(A1相)区域之间的明显对比。计算结果表明,两个相之间的过渡宽度约为5 nm,与TRIM程序模拟的结果吻合较好。
Ion beam patterned CrPt3films were prepared by Kr+ion irradiation at a dose of 2×1014ions/cm2onto L12-ordered CrPt3whose surface was partially masked by electron beam patterned resists. Cross-sectional observation using transmission electron microscopy was carried out to study the patterning boundary of the CrPt3film. Dark-field imaging showed a distinct contrast between non-irradiated (L12phase) and irradiated (A1 phase) regions. The transition width between the two phases was estimated to be about 5nm, which agreed well with the value simulated by a transport ion in matter (TRIM) code simulation.
DOI: 10.1016/j.jmmm.2003.12.382
发表时间: 2004-05
影响因子: 2.7
作者:
T. Kato;H. Ito;K. Sugihara;S. Tsunashima;S. Iwata
通讯作者: T. Kato;H. Ito;K. Sugihara;S. Tsunashima;S. Iwata
DOI: --
发表时间: 2005
期刊: IEEE Trans. Magn. 41-10
影响因子: --
作者:
Kamita;O.;Edi Suharyadi et al.
通讯作者: Edi Suharyadi et al.