Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering
Effect of nitrogen flow ratios on the structure and mechanical properties of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering
复制标题
DOI：
10.1016/j.apsusc.2010.08.078
复制
发表时间：
2010-12
影响因子：
6.7
通讯作者：
Du-Cheng Tsai;Yen-Lin Huang;Sheng-Ru Lin;S. Liang;F. Shieu
中科院分区：
文献类型：
--
作者：
Du-Cheng Tsai;Yen-Lin Huang;Sheng-Ru Lin;S. Liang;F. Shieu
本研究报告的影响，生长条件的特性（TiVCrZrY）N涂层的反应磁控溅射制备在不同的N2总（N2+Ar）流量比，这是RN。采用化学分析电子能谱、X射线衍射、原子力显微镜、场发射扫描电子显微镜、透射电子显微镜和纳米压痕等方法对不同RN的晶体结构、微观结构和力学性能进行了表征。结果表明，TiVCrZrY合金和氮化物涂层分别具有六方密排（hcp）型和氯化钠（NaCl）型固溶体结构。随着RN的增加，涂层中的空洞被消除，柱状晶组织的生长沿着被抑制。因此，形成具有光滑表面的高度堆积的等轴非晶结构。当RN= 100%时，涂层的硬度达到17.5GPa。
This study reports the influence of growth conditions on the characteristics of (TiVCrZrY)N coatings prepared by reactive magnetron sputtering at various N2-to-total (N2+Ar) flow ratio, which is RN. The crystal structures, microstructure, and mechanical properties for different RNwere characterized by electron spectroscopy for chemical analysis, X-ray diffraction, atomic force microscopy, field-emission-scanning electron microscopy, transmission electron microscopy, and nanoindentation. The results indicate that the TiVCrZrY alloy and nitride coatings have hexagonal close-packed (hcp)-type and sodium chloride (NaCl)-type solid–solution structures, respectively. The voids in the coatings are eliminated and the growth of the columnar crystal structures is inhibited along with an increasing RN. As a consequence, highly packed equiaxed amorphous structures with smooth surfaces are formed. The coatings accordingly achieved a pronounce hardness of 17.5GPa when RN=100%.