Quantized positioning of x-ray interferometers
Quantized positioning of x-ray interferometers
复制标题
X射线干涉仪的量化定位
DOI：
10.1063/1.1147805
复制
发表时间：
1997
影响因子：
1.6
通讯作者：
G. Mana
中科院分区：
文献类型：
--
作者：
A. Bergamin;G. Cavagnero;G. Mana
本文论证了利用行波条纹反馈实现扫描X射线干涉仪量化定位和移动的可行性。两个新的功能，反馈和平衡量化，联合收割机结合，以产生准确的定位和平衡位置之间的连续过渡的运动。与前馈定位和运动相比，压电线性和稳定性不受严格条件的限制。在初步实验中，X射线干涉仪的性能得到了极大的改善，实现了0.4 μm的伺服运动，并以皮米分辨率跟踪。
The article demonstrates the feasibility of quantized positioning and moving scanning x-ray interferometers by feedback of traveling fringes. Two new features, feedback and equilibrium quantization, combine to yield accurate positioning and movement by successive transitions between equilibrium positions. In contrast with feedforward positioning and movement, piezoelectric linearity and stability are not subjected to strict conditions. In preliminary experiments, the performances of an x-ray interferometer were greatly improved and servo-movements up to 0.4 μm were achieved and tracked with picometer resolution.