Piezoelectric micro-transformer based on PZT unimorph membrane
Piezoelectric micro-transformer based on PZT unimorph membrane
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基于PZT单压电晶片膜的压电微型变压器
DOI：
10.1088/0960-1317/14/9/016
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发表时间：
2004
影响因子：
2.3
通讯作者：
É. Cattan
中科院分区：
文献类型：
--
作者：
D. Vasić;E. Sarraute;F. Costa;P. Sangouard;É. Cattan
本文提出了一种在SOI（绝缘体上硅）晶片上制作的压电微变压器。微型变压器由一个单压电晶片圆形膜（PZT/硅）。制造使用由溅射沉积和剥离薄材料层的蚀刻组成的原始方法。该Transformer旨在为需要非常低能量的微型系统供电。一个分析模型，使我们能够确定的Transformer的电气等效电路，表示的谐振频率和绘制的偏转和应变形状的膜。已通过干涉测量法进行了机械表征，并使用第一个原型进行了电气表征。
In this paper, a piezoelectric micro-transformer processed in a SOI (silicon-on-insulator) wafer is presented. The micro-transformer consists of a unimorph circular membrane (PZT/silicon). The manufacturing uses an original method consisting of a deposition by sputtering and a etching by lift-off of thin material layers. This transformer is intended to supply micro-systems requiring a very low amount of energy. An analytical model has enabled us to determine the electrical equivalent circuit of the transformer, to express the resonance frequencies and to plot the deflection and strain shapes of the membrane. A mechanical characterization has been carried out by interferometry and an electric characterization has been conducted using a first prototype.