Excimer laser patterning of PEDOT:PSS thin-films on flexible barrier foils: A surface analysis study
Excimer laser patterning of PEDOT:PSS thin-films on flexible barrier foils: A surface analysis study
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柔性阻挡箔上 PEDOT:PSS 薄膜的准分子激光图案化：表面分析研究
DOI：
10.1016/j.apsusc.2013.05.018
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发表时间：
2013
影响因子：
6.7
通讯作者：
G. V. Steenberge
中科院分区：
文献类型：
--
作者：
Sanjeev Naithani;D. Schaubroeck;Y. Vercammen;R. Mandamparambil;I. Yakimets;L. Vaeck;G. V. Steenberge
薄有机膜的选择性激光图案化是有机电子器件如有机发光二极管（OLED）的卷对卷生产中的重要方面。受激准分子激光器非常适合聚合物薄膜的图案化和结构化，因为它们的UV吸收是显著的。研究了用KrF准分子激光器选择性去除多层（无机-有机-无机）阻挡层和柔性PEN（聚萘二甲酸乙二醇酯）基底上的透明导电聚合物PEDOT：PSS（聚（3，4-乙撑二氧噻吩）：聚苯乙烯磺酸盐）。烧蚀坑的特征与电子显微镜和轮廓。首次使用飞行时间静态二次离子质谱法（TOF-S-西姆斯）对图案化区域进行化学表面分析，详细了解激光烧蚀和等离子体后处理后的表面组成。
Selective laser patterning of thin organic films is an important aspect in the roll-to-roll production of organic electronic devices such as organic light emitting diodes (OLEDs). An excimer laser is well suited for the patterning and structuring of polymer thin films as their UV absorption is significant. Selective removal of a transparent conducting polymer PEDOT:PSS (poly(3,4-ethylene dioxythiophene):polystyrene sulfonate) on a multilayered (inorganic–organic–inorganic) barrier and a flexible PEN (polyethylene napthalate) substrate has been studied using a KrF excimer laser. The ablation craters were characterized with electron microscopy and profilometry. For the first time, chemical surface analysis of the patterned area was performed with Time-Of-Flight Static Secondary Ion Mass Spectrometry (TOF-S-SIMS), providing a detailed insight of the surface composition after laser ablation and plasma post-treatments.